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Raman Microprobe Analysis of Laser-Induced Microstructures

Published online by Cambridge University Press:  26 February 2011

P. M. Fauchet
P. M. Fauchet*
Affiliation:
Department of Electrical Engineering Princeton University Princeton, NJ 08544
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Abstract

We study the composition, stress and structure variations across periodic surface undulations produced by pulsed laser illumination of semiconductors, by explosive crystallization of amorphous films, and by laser-assisted CVD. These variations are mapped out with a one micron spatial resolution using a Raman microprobe. Similarities and differences between the three cases are pointed out. These results are also compared to those obtained by deliberately exposing the sample to interfering beams.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 51: Symposium A – Beam-Solid Interactions and Phase Transformations , 1985 , 149
Copyright
Copyright © Materials Research Society 1985

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References

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