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Quantum confinement effect of silicon nanocrystals in situ grown in silicon nitride films

Published online by Cambridge University Press:  15 March 2011

Tae-Youb Kim ,
Nae-Man Park ,
Kyung-Hyun Kim ,
Young-Woo Ok ,
Tae-Yeon Seong ,
CheolJong Choi  and
Gun Yong Sung
Tae-Youb Kim
Affiliation:
Future Technology Research Division, Electronics and Telecommunication Research Institute, Daejon, 305-350, Korea
Nae-Man Park
Affiliation:
Future Technology Research Division, Electronics and Telecommunication Research Institute, Daejon, 305-350, Korea
Kyung-Hyun Kim
Affiliation:
Future Technology Research Division, Electronics and Telecommunication Research Institute, Daejon, 305-350, Korea
Young-Woo Ok
Affiliation:
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology, Kwangju 500-712, Korea
Tae-Yeon Seong
Affiliation:
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology, Kwangju 500-712, Korea
CheolJong Choi
Affiliation:
Samsung Advanced Institute of Technology, Yongin Gyeonggi-do 449-712, Korea
Gun Yong Sung
Affiliation:
Future Technology Research Division, Electronics and Telecommunication Research Institute, Daejon, 305-350, Korea
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Abstract

Silicon nanocrystals were in situ grown in a silicon nitride film by plasma enhanced chemical vapor deposition. The size and structure of silicon nanocrystals were confirmed by high-resolution transmission electron microscopy. Depending on the size, the photoluminescence of silicon nanocrystals can be tuned from the near infrared (1.38 eV) to the ultraviolet (3.02 eV). The fitted photoluminescence peak energy as E(eV) = 1.16 + 11.8/d2 is an evidence for the quantum confinement effect in silicon nanocrystals. The results demonstrate that the band gap of silicon nanocrystals embedded in silicon nitride matrix was more effectively controlled for a wide range of luminescent wavelengths.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 817: Symposium L – New Materials for Microphotonics , 2004 , L4.3
Copyright
Copyright © Materials Research Society 2004

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