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Quantitative Rheed Analysis of Biaxially-Textured Polycrystalline MgO Films on Amorphous Substrates Grown by Ion Beam-Assisted Deposition

Published online by Cambridge University Press:  10 February 2011

R. T. Brewer
Affiliation:
Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena CA 91125, [email protected]
J. W. Hartman
Affiliation:
Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena CA 91125
Harry A. Atwater
Affiliation:
Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena CA 91125
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Abstract

We have developed a computer simulation based on analytic calculation of reflection high energy electron diffraction (RHEED) patterns in the kinematic approximation for mosaic polycrystalline films for given values of electron beam incidence angle, polycrystalline texture, in-plane orientation distribution, and grain size. Although RHEED is most appropriately modeled using dynamical scattering theory, the computational efficiency of the kinematic approximation has enabled the development of a model suitable for real time measurement of crystallographic texture and in-plane orientation distributions for biaxially-textured films grown by ion beam-assisted deposition (IBAD). Using the simulation, we can quantitatively determine how RHEED spot shapes and relative intensities depend on the crystallographic texture and in-plane orientation distribution of polycrystalline films. RHEED patterns taken at 25 keV with incidence angle in the range 1–5 degrees from 10 nm thick, nominally [100]-textured MgO films grown on amorphous Si3N4 by IBAD were analyzed by comparing experimental RHEED phi rocking curves with those predicted by the simulation. For some films, an additional 200 nm thermally-grown MgO homoepitaxial layer was grown on top of the IBAD MgO layer. The model enables a quantitative correlation between biaxial texture and RHEED measurements. RHEED results are compared to X-ray rocking curve film analysis.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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References

1. Harper, J.M.E., Rodbell, K.P., Colgan, E.G., and Hammond, R.H., J. Appl. Phys. 82, 4319(1997).Google Scholar
2. Yu, L.S., Harper, J.M.E., Cuomo, J.J., and Smith, D.A., J. Vac. Sci. Technol. A 4, 443(1986).Google Scholar
3. Ressler, K.G., Sonnenberg, N., and Cima, M.J., J. Am. Ceram. Soc. 80, 2637(1997).Google Scholar
4. Wang, C.P., Do, K.B., Beasley, M.R., Geballe, T.H., and Hammond, R.H., Appl. Phys. Lett. 71, 2955(1997).Google Scholar
5. Cowley, J.M., Diffraction Physics, 3rd ed. (Elsevier Science B.V., Amsterdam, 1995), p. 113.Google Scholar
6. John Hartman, W. and Atwater, Harry A., U.S. Patent Pending.Google Scholar
7. Litvinov, D., O'Donnel, T., and Clarke, R., J. Appl. Phys. 85 (2151) 1999.Google Scholar
8. Groves, J.R., Arendt, P.N., Foltyn, S.R., Depaula, R.F., Peterson, E.J., Holesinger, T.G., Coulter, J.Y., Springer, R.W., Wang, C.P., and Hammond, R.H., IEEE Trans. Appl. Supercond. 9, 1964(1999).Google Scholar
9. Iijima, Y., Hosaka, M., Tanabe, N., Sadakata, N., Saitoh, T., Kohno, O., and Takeda, K., J. Mater. Res. 13, 3106(1998).Google Scholar
10. Arendt, P. N., presented at the 1999 MRS Fall Meeting, Boston, MA, 1999 (unpublished).Google Scholar