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Quantitative Analysis of Raman Spectra from Diamond Like Carbon: Calibration Transfer

Published online by Cambridge University Press:  10 February 2011

S. S. Rosenblum ,
Kevin L. Davis  and
James M. Tedesco
S. S. Rosenblum
Affiliation:
Kaiser Optical Systems, Inc., Ann Arbor, Michigan 48106
Kevin L. Davis
Affiliation:
Kaiser Optical Systems, Inc., Ann Arbor, Michigan 48106
James M. Tedesco
Affiliation:
Kaiser Optical Systems, Inc., Ann Arbor, Michigan 48106
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Abstract

We report on Raman studies of diamond-like carbon (DLC) films; in particular, we report on the instrumentation and methodology required for comparing Raman measurements taken on different Raman analyzers. Raman spectroscopy has taken on an increasingly important role in materials processing because of its capability of performing non-destructive, in situ characterization of thin films. In particular, noncrystalline carbon coatings have become ubiquitous as protective layers on everything from machine tools to hard disk drives. As tolerances on coating properties begin to play an important part in determining device failure, Raman spectroscopy has found ever greater application as a quality control/quality assurance tool. However, use of Raman as an analytical tool has been hampered by the inability to quantitatively compare spectra obtained with different Raman analyzers. By using automated, robust calibration protocols on both the wavelength and intensity axes, we have demonstrated cross-instrument calibration transfer of DLC films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 327
Copyright
Copyright © Materials Research Society 1999

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