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Purity and Uv Absorption Cross Sections of TMA, TMG, and TMAs

Published online by Cambridge University Press:  28 February 2011

Hideo Okabe  and
M.K. Emadi-Babaki
Hideo Okabe
Affiliation:
Department of Chemistry and Materials Science Research Center of Excellence, Howard University, Washington, DC, 20059
M.K. Emadi-Babaki
Affiliation:
Department of Chemistry and Materials Science Research Center of Excellence, Howard University, Washington, DC, 20059
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Abstract

Vapor pressures of commercial electronic grade TMA,.TMG and TMAs samples have been measured at various temperatures and compared with those of known pure samples. Only TMA showed the presence of impurities. The UV absorption spectrum of impure TMA shows toluene to be an impurity. The UV absorption cross sections of TMA, TMG and TMAs have been measured and tabulated at several wavelengths.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 145: Symposium A – III-V Heterostructures for Electronic/Photonic Devices , 1989 , 187
Copyright
Copyright © Materials Research Society 1989

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