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Pulsed Laser Deposition of Piezoelectric Films for Micro-Fluidic Applications

Published online by Cambridge University Press:  10 February 2011

W.J. Kim ,
J.C. Rife ,
J.S. Horwitz ,
R.C.Y. Auyeung ,
D.B. Chrisey ,
M.I. Bell  and
R.W. Smith
W.J. Kim
Affiliation:
SFA Inc., 1401 McCormick Dr., Largo, MD 20774, [email protected]
J.C. Rife
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
J.S. Horwitz
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
R.C.Y. Auyeung
Affiliation:
SFA Inc., 1401 McCormick Dr., Largo, MD 20774, [email protected]
D.B. Chrisey
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
M.I. Bell
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
R.W. Smith
Affiliation:
Department of Chemistry, University of Nebraska, Omaha, NE
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Abtract

Thick films of piezoelectric materials have been grown by pulsed laser deposition (PLD) for use in the development of a programmable micro-fluidic controller. ZnO and BaTiO3 (BTO) films were deposited onto various substrates, including Au/Cr coated Si, Pt/Ti coated Si, and Au/Pd coated glass microchannel plates, at substrate temperatures from room temperature to 800 °C in a background pressure of O2 from 3 to 350 mTorr. ZnO films (∼5 µm thick) were single phase and (001) oriented. BTO films, 33 µm thick, on Pt/Ti/Si were single phase and polycrystalline. To fabricate piezoelectric acoustic transducer, an array of 2 × 4 gold electrodes was deposited onto the thick BTO films through a shadow mask by PLD. The transducers were attached to a simple fluidic circuit with a 1.6 × 1.6 mm cross section and used to generate a flow velocity of 1 mm/s at an operating frequency of 50 MHz.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 635
Copyright
Copyright © Materials Research Society 1999

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References

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