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Proton NMR Studies of Amorphous Plasma-Deposited Films

Published online by Cambridge University Press:  15 February 2011

Jeffrey A. Reimer ,
Robert W. Vaughan  and
John C. Knights
Jeffrey A. Reimer
Affiliation:
Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, California 91125
Robert W. Vaughan
Affiliation:
Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, California 91125
John C. Knights
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304
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Abstract

Proton magnetic resonance data are presented for the hydrogen alloys of plasma-deposited amorphous boron, silicon, carbon, silicon carbide, and silicon nitride. Linewidth and lineshape analysis leads to the conclusion that hydrogen nuclei are clustered in a-Si/C:H, a-C:H, and a-Si/NiH. The a-Si/C:H and a-C:H data show that hydrogen exists in two phases. Modeling of linewidths in a-Si/C:H indicates that the two phases are heavily hydrogenated carbon clusters imbedded in a weakly hydrogenated silicon lattice. Evidence is also presented for the presence of motionally narrowed hydrogen spectra in a-B:H, a-Si/N:H and a-C:H. “B NMR spectra in a-B:H show no evidence of motional narrowing. It is suggested that the hydrogen nuclei giving rise to the motionally narrowed spectra are associated with disorder modes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 3: Symposium – Nuclear and Electron Resonance Spectroscopies Applied to Materials Science , 1980 , 347
Copyright
Copyright © Materials Research Society 1981

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References

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