Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-19T05:36:36.699Z Has data issue: false hasContentIssue false
  • English
  • Français

Prospects for Active Matrix Displays on Plastic

Published online by Cambridge University Press:  15 February 2011

Stephen M. Gates
Stephen M. Gates*
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Hts., NY 10598
Get access

Abstract

We review the status of active matrix display fabrication on plastic substrates, specifically active matrix liquid crystal displays (AM LCDs). Research efforts in the U.S. and Europe are surveyed. Currently available transparent plastics, and active programs to improve these materials are described. Our work on thin film transistor (TFT) fabrication at 125°C is then reported, with a comparison of reactive sputtering and plasma enhanced CVD methods.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 467: Symposium A – Amorphous and Microcrystalline Silicon Technology - 1997 , 1997 , 843
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. McCormick, C.S., Weber, C.E., Abelson, J.R. and Gates, S.M.; Appl. Phys. Lett. 70, (1997) 226.Google Scholar
2. Young, N.D., Bunn, R.M., Wilks, R.W., McCulloch, D.J., Harkin, G., Deane, S.C., Edwards, M.J., and Pearson, A.D.; Proc. of Euro Display '96 (1996) 555.Google Scholar
3. Smith, P.M., Carey, P.G. and Sigmon, T.W.; Appl. Phys. Lett. 70, (1997) 342.Google Scholar
4. Lueder, E.; Proc. of Asia Display '95 (1995) 9.Google Scholar
5. West, J.L., Rouberol, M., Franci, J.J., Ji, Y., Doane, J.W. and Pfeiffer, M.; Proc. of Asia Display '95 (1995) 55.Google Scholar
6. Stein, A., Liss, A., Dintinger, W., Rosedale, J. and Heslar, C.; SID 96 Applications Digest, Vol. XXVII (1996) 11.Google Scholar
7. Fields, S.D. and Galione, J.R.; SID 96 Applications Digest, Vol. XXVII (1996) 7.Google Scholar
8. Abelson, J.R.; Appl. Phys. A, 56, (1993) 493‥Google Scholar
9. Yamasaki, S.; Chapter 4 in Glow Discharge Hydrogenated Amorphous Silicon, Tanaka, K. (Ed.); Kluwer, Boston, (1989).Google Scholar
10. Srinivasan, E., Lloyd, D.A. and Parsons, G.N.; J. Vac. Sci. Tech. A 15, (1997) 77.Google Scholar