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Property Improvement of PLZT Capacitor Using CaRuO3 Top Electrode

Published online by Cambridge University Press:  21 March 2011

Hiroshi Funakubo ,
Noriyuki Higashi  and
Norikazu Okuda
Hiroshi Funakubo
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate school of Science and Engineering, Tokyo Institute of Technology G1-405, 4259, Nagatsuta-cho, Midori-ku Yokohama, 226-8502, Japan
Noriyuki Higashi
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate school of Science and Engineering, Tokyo Institute of Technology G1-405, 4259, Nagatsuta-cho, Midori-ku Yokohama, 226-8502, Japan
Norikazu Okuda
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate school of Science and Engineering, Tokyo Institute of Technology G1-405, 4259, Nagatsuta-cho, Midori-ku Yokohama, 226-8502, Japan
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Abstract

SrRuO3 and CaRuO3 films prepared by MOCVD were compared not only in term of their own properties but for their characteristics as the top electrodes of (Pb, La)(Zr, Ti)O3[PLZT] capacitor, especially for H2 degradation. Resistivity of CaRuO3 and SrRuO3 films increased after heat treatment in H2-containing atmosphere, but was recovered by a heat treatment at 600 °C under O2 atmosphere. When SrRuO3 and CaRuO3 films deposited at 600 °C were used as top electrodes, the remanent polarization(Pr) value of SrRuO3/PLZT/Pt and CaRuO3/PLZT/Pt capacitors were almost the same as the values for capacitors with a Pt top electrode. After a heat treatment in a 3 % H2 atmosphere at 200 °C, followed by one in O2 atmosphere at 450 °C, Pr value was perfectly recovered for both of SrRuO3 and CaRuO3 films. The leakage current become the smallest when using 50 nm-thick CaRuO3 film as a top electrode. Moreover, no degradation was observed for fatigue test up to 1010 cycles when MOCVD-CaRuO3 films were used as top electrodes. These data show that MOCVD-CaRuO3 film with thin thickness is a useful top electrode for PLZT capacitor.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC4.6.1
Copyright
Copyright © Materials Research Society 2001

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