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Properties of Pzt Thin Films with 2CdO·B2O3 Glass Phase Additive

Published online by Cambridge University Press:  25 February 2011

Keith G. Brooks ,
Jiayu Chen ,
K. R. Udayakumar  and
L. Eric Cross
Keith G. Brooks
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
Jiayu Chen
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
K. R. Udayakumar
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
L. Eric Cross
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
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Abstract

Lead zirconate titanate thin films containing 0-4 wt.% of 2CdO·B2O3 glass phase additive have been fabricated by sol-gel processing. Smooth dense perovskite films of approximately 3500Å thickness were formed on Si wafers by a multiple layer spin coating process followed by rapid thermal annealing. Remanent polarizations of up to 23μC/cm2 were measured. Hysteresis properties were found to be very sensitive to annealing time at 700°C, with remanence being maximized at 100-200 seconds.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 263
Copyright
Copyright © Materials Research Society 1992

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