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Properties of MoO3 Thin Film Polymorphs

Published online by Cambridge University Press:  26 February 2011

E. M. McCARRON III  and
P. F. Carcia
E. M. McCARRON III
Affiliation:
Central Research and Development Department, E. I. du Pont de Nemours & Company, Experimental Station, Building 356, Wilmington, DE 19898
P. F. Carcia
Affiliation:
Central Research and Development Department, E. I. du Pont de Nemours & Company, Experimental Station, Building 356, Wilmington, DE 19898
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Abstract

Thin film polymorphs of molybdenum trioxide have been synthesized by RF sputtering. Films deposited on thermally floating substrates are polycrystalline and exhibit preferred orientation. Depending upon the oxygen partial pressure maintained during sputtering, the films can be made to crystallize in either the thermodynamically stable orthorhombic a MoO3 form (unique 2D-layered structure) or the metastable monoclinic /3 MoO3 phase (3D ReO3-related structure). Metastable β films can be converted thermally to the a phase and the transformation appears topotactic. Films deposited on cooled substrates are amorphous. A correlation between the particular phase formed and adatom mobility is noted.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 77: Symposium D – Interfaces, Superlattices, and Thin Films , 1986 , 319
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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