Hostname: page-component-6bf8c574d5-w79xw Total loading time: 0 Render date: 2025-02-20T15:15:46.063Z Has data issue: false hasContentIssue false
  • English
  • Français

Probing Nitride Thin Films in 3-Dimensions using a Variable Energy Electron Beam

Published online by Cambridge University Press:  03 September 2012

Carol Trager-Cowan ,
D. McColl ,
F. Sweeney ,
S. T. F. Grimson ,
J-F. Treguer ,
A. Mohammed ,
P. G. Middleton ,
S. K. Manson-Smith ,
K. P. O'Donnell  and
W. Van der Stricht
...Show all authors
Carol Trager-Cowan
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
D. McColl
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
F. Sweeney
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
S. T. F. Grimson
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
J-F. Treguer
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
A. Mohammed
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
P. G. Middleton
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
S. K. Manson-Smith
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
K. P. O'Donnell
Affiliation:
Dept. Physics and Applied Physics, University of Strathclyde, Glasgow G4 0NG, UK
W. Van der Stricht
Affiliation:
IMEC-INTEC, University of Gent, Gent 9000, Belgium
I. Moerman
Affiliation:
IMEC-INTEC, University of Gent, Gent 9000, Belgium
P. Demeester
Affiliation:
IMEC-INTEC, University of Gent, Gent 9000, Belgium
M. F. Wu
Affiliation:
KULeuven, Leuven, Belgium
A. Vantomme
Affiliation:
KULeuven, Leuven, Belgium
D. Zubia
Affiliation:
University of New Mexico, Center for High Technology Materials,1313 Goddard, SE Albuquerque, NM, USA
S. D. Hersee
Affiliation:
University of New Mexico, Center for High Technology Materials,1313 Goddard, SE Albuquerque, NM, USA
Get access

Abstract

In this paper we illustrate the application of electron beam techniques to the measurement of strain, defect and alloy concentrations in nitride thin films. We present brief comparative studies of CL spectra of AlGaN and InGaN epilayers and EBSD patterns obtained from two silicon-doped 3 μm thick GaN epilayers grown on an on-axis (0001) sapphire substrate and a sapphire substrate misoriented by 10° toward the m-plane (1010).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 595: Symposium W – GaN and Related Alloys - 1999 , 1999 , F99W5.10
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Napchan, E. and Holt, D B, Inst. Phys. Conf. Ser. 87, eds Cullis, A. G. et al. , (IOP, 1987) pp. 733.Google Scholar
2. Steude, G. et al. , MRS Internet J. Nitride Semicond. Res. 4S1, G3.26 (1999).Google Scholar
3. Kim, S. et al. , Appl. Phys. Lett., 67 380 (1995).Google Scholar
4. Edward, N. V. et al. , Appl. Phys. Lett., 73 2808 (1998).Google Scholar
5. Trager-Cowan, C. et al. , Mat. Res. Soc. Symp. Proc., 482, 715 (1998).Google Scholar
6. O'Donnell, K. P. et al. , this conference reference number W11.26Google Scholar
7. Shimuzu, M. et al. , Sol. St. Electr., 41 145 (1997).Google Scholar
8. Hiramatsu, K. et al. , MRS Internet J. Nitride Semicond. Res., 2 6 (1997).Google Scholar
9. Dingley, D. J. et al. , Atlas of Backscattering Kikuchi Diffraction Patterns, (IOP, 1995).Google Scholar
10. Dingley, D. J. and Field, D. P., Materials Science and Technology, 13 69 (1997).Google Scholar
11. Troost, K. Z. et al. , Appl. Phys. Lett., 62 1110 (1993).Google Scholar