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Probe Tip Replacement System Inside the FIB

Published online by Cambridge University Press:  26 February 2011

Gonzalo Amador ,
Lyudmila Zaykova-Feldman  and
Thomas M Moore
Gonzalo Amador
Affiliation:
[email protected], Inc.10410 Miller Rd. Dallas TX 75238United States
Lyudmila Zaykova-Feldman
Affiliation:
[email protected], Omniprobe, Inc., 10410 Miller Rd., Dallas, TX, 75238, United States
Thomas M Moore
Affiliation:
[email protected], Omniprobe, Inc., 10410 Miller Rd., Dallas, TX, 75238, United States
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Abstract

The in-situ lift-out method for TEM sample preparation, based on the use of a chamber-mounted nanomanipulator and FIB induced material deposition, has proven its effectiveness over the last several years. The time-efficiency introduced by this method is one reason for its success and rapid adoption within the semiconductor industry. Improvements to in-situ TEM lift-out preparation have been pursued to further improve sample processing time. One area targeted has involved methods to enable rapid in-situ probe tip replacement without having to remove the probe shaft from the vacuum chamber. This paper describes an in-situ probe tip replacement system that successfully solves this problem.

Keywords

ion beam analysision-beam processingtransmission electron microscopy (TEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 983: Symposium LL – Focused Ion Beams for Analysis and Processing , 2006 , 0983-LL05-07
Copyright
Copyright © Materials Research Society 2007

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References

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