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Preparation of Diamond-Like Carbon by Pulsed Laser Deposition

Published online by Cambridge University Press:  10 February 2011

T. Matsui ,
M. Yudasaka ,
K. Imai ,
Y. Ohki  and
S. Yoshimura
T. Matsui
Affiliation:
Yoshimura Pi-Electron Materials Project, ERATO, JRDC, c/o Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214, Japan
M. Yudasaka
Affiliation:
Yoshimura Pi-Electron Materials Project, ERATO, JRDC, c/o Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214, Japan
K. Imai
Affiliation:
Yoshimura Pi-Electron Materials Project, ERATO, JRDC, c/o Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214, Japan
Y. Ohki
Affiliation:
Yoshimura Pi-Electron Materials Project, ERATO, JRDC, c/o Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214, Japan
S. Yoshimura
Affiliation:
Yoshimura Pi-Electron Materials Project, ERATO, JRDC, c/o Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214, Japan
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Abstract

Diamond-like carbon (DLC) films have been prepared by pulsed laser deposition using graphite and cured phenol resin as targets. By comparison with previous reports, it is found that the lower power density (fluence) of irradiated pulsed laser can form DLC. In case of cured phenol resin used as a target, DLC was formed at almost the same wavelength and fluence region as that with graphite.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 229
Copyright
Copyright © Materials Research Society 1996

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References

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