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Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition

Published online by Cambridge University Press:  11 January 2012

Cagla Ozgit ,
Fatma Kayaci ,
Inci Donmez ,
Engin Cagatay ,
Tamer Uyar  and
Necmi Biyikli
Cagla Ozgit
Affiliation:
UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey.
Fatma Kayaci
Affiliation:
UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey.
Inci Donmez
Affiliation:
UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey.
Engin Cagatay
Affiliation:
UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey.
Tamer Uyar
Affiliation:
UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey.
Necmi Biyikli
Affiliation:
UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey.
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Abstract

Al2O3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimethylaluminum (TMAl), water (H2O), and ammonia (NH3) as the aluminum, oxygen, and nitrogen precursors, respectively. Deposition rates of Al2O3 and AlN at this temperature were ∼1.05 and 0.86 Å/cycle. After the depositions, Al2O3- and AlN-coated nanofibers were calcinated at 500°C for 2 h in order to remove organic components. Nanotubes were characterized by using X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). AlN nanotubes were polycrystalline as determined by high resolution TEM (HR-TEM) and selected area electron diffraction (SAED). TEM images of all the samples reported in this study indicated uniform wall thicknesses.

Keywords

atomic layer depositionnanostructuretransmission electron microscopy (TEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1408: Symposium BB – Functional Nanowires and Nanotubes , 2012 , mrsf11-1408-bb15-05
Copyright
Copyright © Materials Research Society 2012

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