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Preparation and Pyroelectric Properties of La-Modified PbTiO8 Thin Films by Rf-Magnetron Sputtering

Published online by Cambridge University Press:  10 February 2011

T. Kamada ,
R. Takayama ,
A. Tomozawa ,
S. Fujii ,
K. IIJIMA  and
T. Hirao
T. Kamada
Affiliation:
Human Environment Res. Lab., Matsushita Electric Industrial Co., Ltd., Seika, Kyoto 619–02, Japan
R. Takayama
Affiliation:
Human Environment Res. Lab., Matsushita Electric Industrial Co., Ltd., Seika, Kyoto 619–02, Japan
A. Tomozawa
Affiliation:
Human Environment Res. Lab., Matsushita Electric Industrial Co., Ltd., Seika, Kyoto 619–02, Japan
S. Fujii
Affiliation:
Human Environment Res. Lab., Matsushita Electric Industrial Co., Ltd., Seika, Kyoto 619–02, Japan
K. IIJIMA
Affiliation:
Res. Planning Dept., Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka 570, Japan
T. Hirao
Affiliation:
Matsushita Technoresearch, Inc., Moriguchi, Osaka 570, Japan
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Abstract

High-quality La-modified PbTiO3 (Pb1−xLaxTi1−x/4O3; PLT) thin films were prepared by an rf-magnetron sputtering method. In this method, intermittent deposition was realized by periodical repetition of deposition and nondeposition processes. This deposition was found to enhance the horizontal grain growth of the films. The PLT thin films exhibit the phenomena named “self-polarization” and have high pyroelectric properties (pyroelectric coefficient γ of 5.0×10−8C/cm2K and low dielectric constant εr of 185) without a poling treatment. It was interestingly found that this self-polarization of the PLT thin films depends on the substrate temperature (Ts) and is based on a fairly small difference of the film composition (Pb/Ti). The pyroelectric properties were improved by means of addition of Mg to the PLT thin films. These thin films are expected to offer suitable materials for pyroelectric infrared (IR) sensors. High sensitive pyroelectric IR sensors (single element type and linear array type) were fabricated by using the PLT (x=0. 1) thin films with the new structures and the device processes. The sensors have remarkably high specific detectivity D* of 3.5×108 cm. Hz1/2/W and very fast response. A new compact IR sensing system using the linear array sensor (8 elements) has been developed for a new type of room air-conditioner.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 377
Copyright
Copyright © Materials Research Society 1996

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