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Preparation and Property Characterization of Oriented PLZT Thin Films Processed Using Sol-Gel Method

Published online by Cambridge University Press:  15 February 2011

Dae Sung Yoon ,
Chang Jung Kim ,
Joon Sung Lee ,
Chaun Gi Choi ,
Won Jong Lee  and
Kwangsoo No
Dae Sung Yoon
Affiliation:
Department of Ceramic Science and Engineering
Chang Jung Kim
Affiliation:
Department of Ceramic Science and Engineering
Joon Sung Lee
Affiliation:
Department of Ceramic Science and Engineering
Chaun Gi Choi
Affiliation:
Department of Ceramic Science and Engineering
Won Jong Lee
Affiliation:
Department of Electronic Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, Korea.
Kwangsoo No
Affiliation:
Department of Ceramic Science and Engineering
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Abstract

Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTiO3(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600°C and 700°C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively. The dielectric and optical properties of both the oriented films and the noncrystalline films were measured and discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 499
Copyright
Copyright © Materials Research Society 1994

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References

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