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Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique
Published online by Cambridge University Press: 10 February 2011
Abstract
An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.
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- Research Article
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- Copyright © Materials Research Society 2000
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