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Precise and Smooth Removal from Polymer Surfaces by VUV Excimer Laser Ablation at 157 nm: PMMA.

Published online by Cambridge University Press:  10 February 2011

G. Padeletti ,
M. Lapczyna  and
M. Stuke
G. Padeletti
Affiliation:
Max-Planck-Institut fir biophysikalische Chemie, P.O Box 2841, D-37018 Gottingen, Germany, [email protected].
M. Lapczyna
Affiliation:
Istituto di Chimica dei Materiali-Consiglio Nazionale delle Ricerche, cp 10 Monterotondo Staz., 00016 Monterotondo (Roma), Italy, [email protected]
M. Stuke
Affiliation:
Istituto di Chimica dei Materiali-Consiglio Nazionale delle Ricerche, cp 10 Monterotondo Staz., 00016 Monterotondo (Roma), Italy, [email protected]
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Abstract

Smooth polymer surfaces can be generated by VUV laser ablation at 157 nm. This has been demonstrated for poly-methyl-metacrylate (PMMA) by atomic force microscopy (AFM) analysis of laser-exposed surfaces. At excimer laser fluences below 30 mJ/cm2 the mean roughness (Ra) remains below 10 nm for both single and 10 shot exposures.

A detailed characterization of the surface nano-morphology distribution carried out by the “power spectral density” (PSD) analysis, shows that the surface is smoothened by the VUV laser for lateral scales smaller than 20 μm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 544: Symposium Y – Plasma Deposition and Treatment of Polymers , 1998 , 3
Copyright
Copyright © Materials Research Society 1999

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