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Power and Radio Frequency Inductors Using a Hybrid Ferrite-Flex Foil Technology

Published online by Cambridge University Press:  26 February 2011

Martin Gijs  and
Menouer Saidani
Martin Gijs
Affiliation:
[email protected], Ecole Polytechnique Fédérale de Lausanne, Institute of Microelectronics and Microsystems, BM 3.128, Station 17, Lausanne, 1015, Switzerland
Menouer Saidani
Affiliation:
[email protected], Ecole Polytechnique Fédérale de Lausanne, Institute of Microelectronics and Microsystems, Station 17, Lausanne, 1015, Switzerland
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Abstract

We present a hybrid technology for the realization of three-dimensional miniaturized power inductors and RF inductors on silicon. The power inductors consist of planar Cu coils on polyimide substrates, and mm-size ferrite magnetic cores, obtained by three-dimensional micro-patterning of ferrite wafers using powder blasting. The coils are realized using an in-house developed high-resolution polyimide spinning and Cu electroplating process. Winding widths down to 5 μm have been obtained and total device volumes are ranging between 1.5 and 10 mm3. Inductive and resistive properties are characterized as a function of frequency; inductance values in the 100 μH range have been obtained. We also have realized millimetre-size RF inductors on silicon using the same polyimide mould - Cu electroplating coil technology. Subsequently the coils are assembled with magnetic cover plates of commercially available bulk Ni-Zn ferrites of high resistivity. Using the magnetic flux-amplifying ferrite plates, we obtain a 40 % enhancement of the inductance and a 25 % enhancement of the quality factor (Q=10-20) for frequencies up to 0.2 GHz.

Keywords

microelectro-mechanical (MEMS)ferromagneticelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 969: Symposium W – Heterogeneous Integration of Materials for Passive Components and Smart Systems , 2006 , 0969-W06-04
Copyright
Copyright © Materials Research Society 2007

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