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Postbuckled Square Thin Film Membranes Under Differential Pressure

Published online by Cambridge University Press:  21 March 2011

Torsten Kramer  and
Oliver Paul
Torsten Kramer
Affiliation:
IMTEK, Microsystem Materials Laboratory, University of Freiburg Georges-Köhler-Allee 103, D-79110 Freiburg, Germany [email protected]
Oliver Paul
Affiliation:
IMTEK, Microsystem Materials Laboratory, University of Freiburg Georges-Köhler-Allee 103, D-79110 Freiburg, Germany [email protected]
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Abstract

We report quantitative results on the load-deflection response of compressively prestressed square membranes under differential pressure. The membranes consist of 0.485 μm and 1.9 μm thick silicon nitride films. For these square membranes we observed a new symmetry transition of the deflection profile between a state without reflection symmetries at small loads to a state with reflection symmetries at sufficiently large loads. The load-deflection response was modeled by finite element simulations covering a wide range of prestrains e0 and pressures using various geometries. From the symmetry transition process, Young's modulus E = (150±5) GPa and the prestrain ε0 = (1.6±0.1) 10-3 of the membrane material was extracted.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L3.4.1
Copyright
Copyright © Materials Research Society 2002

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References

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