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Polysilsesquioxanes Through Base-Catalyzed Redistribution of Oligohydridosiloxanes
Published online by Cambridge University Press: 01 February 2011
Extract
Organopolysilsesquioxanes have recently gained much interest as materials for low-K dielectrics [1], ceramic precursors [2] and photoresists [3]. Typical sol-gel synthesis of polysilsesquioxanes involves the hydrolysis of organotricholorosilanes and/or organotrialkoxysilanes in the presence of acid or base catalysts and organic solvents. However, under sol-gel conditions most organotrialkoxysilanes do not afford silsesquioxane gels. This limits the range of organic functionalities that can be introduced into these hybrid organicinorganic materials.
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- Copyright © Materials Research Society 2000