Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-27T01:51:27.239Z Has data issue: false hasContentIssue false
  • English
  • Français

Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Published online by Cambridge University Press:  04 April 2011

Lamartine Meda
Lamartine Meda*
Affiliation:
Department of Chemistry, Xavier University of LA, 1 Drexel Drive, New Orleans, LA 70125, U.S.A.
Get access

Abstract

Lithium phosphorus oxynitride (Lipon) thin films have been deposited by a plasmaenhanced metalorganic chemical vapor deposition (PE-MOCVD) method using triethyl phosphate [(CH2CH3)3PO4] and lithium tert-butoxide [(LiOC(CH3)3] precursors. Growth rates were between 100 and 415 Å/min, and thicknesses ranged from 1 to 2.5 μm. X-ray powder diffraction showed that the films were amorphous, and X-ray photoelectron spectroscopy revealed approximately 6.9 at.% carbon in the films. The ionic conductivity of Lipon was measured using electrochemical impedance spectroscopy (EIS) and approximately 1.02 μS/cm was obtained, which is consistent with the ionic conductivity of Lipon deposited by radio frequency magnetron sputtering of Li3PO4 targets. An all-solid-state thin-film lithium microbattery such as Li/Lipon/LiCoO2/Au/substrate was successfully fabricated with Lipon deposited by PE-MOCVD. The battery has a capacity of ca. 22 μAh/cm2μm.

Keywords

thin filmplasma-enhanced CVD (PECVD) (deposition)Li
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1313: Symposium KK – Materials for Advanced Lithium Batteries , 2011 , mrsf10-1313-kk09-08
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Bates, J. B., Dudney, N. J., Gruzalski, G. R., Zuhr, R. A., Choudhury, A., Luck, C. F., , J. and Robertson, D., Journal of Power Sources, 43, 103 (1993).Google Scholar
2. Choi, C. H., Cho, W. I., Cho, B. W., Kim, H. S., Yoon, Y. S., Taka, Y. S., Electrochemical and Solid-State Letters, 5, A14 (2002).Google Scholar
3. Miyashiro, H., Kobayashi, Y., Seki, S., Mita, Y., Usami, A., Nakayama, M., and Wakihara, M., Chem. Mater., 17, 5603 (2005).Google Scholar
4. Liu, W.-Y., Fu, Z. W., Li, C.-L., and Qin, Q.-Z., Electrochem and Solid-State Lett., 7, J36 (2004).Google Scholar
5. Verda, F., Goldner, R. B., Hass, T. E., and Zerigian, P., Electrochem. Solid-State Lett., 5, A239 (2002).Google Scholar
6. Kim, Y. G. and Wadley, H. N. G., Journal of Power Sources, 187, 591 (2009).Google Scholar