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Planarization of Gratings using Magnetorheological Finishing

Published online by Cambridge University Press:  10 February 2011

Fuqian Yang ,
D. Golini ,
D. H. Raguin  and
S. D. Jacobs
Fuqian Yang
Affiliation:
Center for Optics Manufacturing, University of Rochester, 240 East River Road, Rochester, NY 14623
D. Golini
Affiliation:
Center for Optics Manufacturing, University of Rochester, 240 East River Road, Rochester, NY 14623 QED Technologies, LLC., 1080 University Avenue, Rochester, NY 14607
D. H. Raguin
Affiliation:
Rochester Photonics Corporation, 330 Clay Road, Rochester, NY 14623
S. D. Jacobs
Affiliation:
Center for Optics Manufacturing, University of Rochester, 240 East River Road, Rochester, NY 14623 Laboratory for Laser Energetics, University of Rochester, 240 East River Road, Rochester, NY 14623
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Abstract

Surface planarization of BK7 glass gratings with periods of 130, 30, 16, 8 and 5 gm was performed with the magnetorheological finishing (MRF) process at the Center for Optics Manufacturing (COM). Approximately 0.5 μm of material was removed in the experiments. Grating height decreased as a function of grating period, going from ∼0.44 μm to ∼0.044 μm for a 130 μm period, and ∼0.44 μm to ∼30 Å for grating periods of 30, 16, 8 and 5 gm. The microroughness on ridges and in valleys of the grating structures also decreased with material removal from ∼100 Å to ∼10 Å for gratings with 30 and 16 μm periods.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 477 , 1997 , 131
Copyright
Copyright © Materials Research Society 1997

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References

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