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Planar and Perpendicular Conductivity of Doping Modulated Amorphous Silicon Multilayers
Published online by Cambridge University Press: 28 February 2011
Abstract
The conductivity of a-Si:H multilayers consisting of alternating boron and phosphorus doped layers has been studied as a function of sub-layer thickness. The planar and perpendicular dark conductivity is compared with theoretical analysis of space-charge doping in these structures and this effect is found to dominate the transport as the sub-layer thickness is reduced below a critical value
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