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Piezoelectric Thin Film Ultrasonic Micromotors

Published online by Cambridge University Press:  25 February 2011

K. R. Udayakumar ,
J. Chen ,
K. G. Brooks ,
L. E. Cross ,
A. M. Flynn  and
D. J. Ehrlich
K. R. Udayakumar
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
J. Chen
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
K. G. Brooks
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
L. E. Cross
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802
A. M. Flynn
Affiliation:
MIT Artificial Intelligence Laboratory, Cambridge, MA 02139
D. J. Ehrlich
Affiliation:
MIT Lincoln Laboratory, Lexington, MA 02173
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Abstract

Thin films of lead zirconate titanate have been fabricated for application to a new family of flexure-wave piezoelectric micromotors that are characterized by low speed and high torque. The high relative dielectric constant and breakdown strength of the films lead to high stored energy densities. Evaluation of the film as a bimorph yielded a value of -88 pC/N for the transverse piezoelectric strain coefficient, d31; the relevant electromechanical coupling factor, k31, calculated thereupon was 0.22. The development of the piezoelectric ultrasonic micromotors from the PZT thin films, and the architecture of the stator structure are described. Nonoptimized prototype micromotors show rotational velocities of 100-300 rpm at drives of 3-5 V.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 49
Copyright
Copyright © Materials Research Society 1992

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References

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