Hostname: page-component-669899f699-8p65j Total loading time: 0 Render date: 2025-05-05T06:55:43.041Z Has data issue: false hasContentIssue false
  • English
  • Français

Piezoelectric Properties of Lead Zirconate Titanate Films Prepared by Arc Discharged Reactive Ion-Plating Method

Published online by Cambridge University Press:  26 February 2011

Masahiro Akamatsu ,
Yoshiaki Yasuda ,
Masanao Tani  and
Takashi Iijima
Masahiro Akamatsu
Affiliation:
[email protected], Stanley Electric Co., Ltd., Research & Development Center, 1-3-1 Edanishi, Aoba, Yokohama, Kanagawa, 225-0014, Japan
Yoshiaki Yasuda
Affiliation:
[email protected], Stanley Electric Co., Ltd., Research & Development Center, Japan
Masanao Tani
Affiliation:
[email protected], Stanley Electric Co., Ltd., Research & Development Center, Japan
Takashi Iijima
Affiliation:
[email protected], National Institute of Advanced Industrial Science and Technology, Research Institute of Instrumentation Frontier, Japan
Get access

Abstract

This study is about new plasma deposition method fabricating piezoelectric films applied for actuators in MEMS devices.

Keywords

piezoelectricplasma depositionmicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 902: Symposium T – Ferroelectric Thin Films XIII , 2005 , 0902-T03-05
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

References:

1 Akamatsu, M., Tani, M. and Yasuda, Y., Jpn. J. Appl. Phys. 41, 6976 (2002).Google Scholar
2 Yasuda, Y., Akamatsu, M., Tani, M., Yoshida, M., Kondo, K. and Iijima, T., Jpn. J. Appl. Phys. 40, 5518 (2001).Google Scholar
3 Wang, Q. and Cross, L. E., Ferroelectrics 215, 187 (1998).Google Scholar
4 Tani, M., Akamatsu, M., Yasuda, Y., Fujita, H. and Toshinoshi, H., Proc. Optical MEMS 2004, 188 (2004).Google Scholar
5 Jaffe, B., Cook, W. R. and Jaffe, H., “Piezoelectric Ceramics” (Academic Press, London and New York, 1971) pp.146.Google Scholar