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Piezoelectric Micromachined Ultrasonic Transducers Based on PZT Films

Published online by Cambridge University Press:  11 February 2011

Jacek Baborowski ,
Nicolas Ledermann  and
Paul Muralt
Jacek Baborowski
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland.
Nicolas Ledermann
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland.
Paul Muralt
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland.
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Abstract

Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consisted of a oxidized and platinized silicon membrane coated with a 2 μm thick (100)-textured Pb(Zr,Ti)O3 (PZT) thin film deposited by sol-gel techniques. SOI wafers have been applied to obtain a good definition of the silicon part of the membrane. Test devices have been characterized in air and in an insulating liquid.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J12.4
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Ladabaum, I., Jin, X.C., Soh, H.T., Atalar, A., and Khuri-Jakub, B.T., App. Phys. Lett. 69, 3674–3676 (1998).Google Scholar
2. Bernstein, J.J., Finberg, S.L., Houston, K., Niles, L.C., Chen, H.D., Cross, L.E., Li, K.K., and Udayakumar, K., IEEE Trans. UFFC 44, 960–969 (1997).Google Scholar
3. Perçin, G., Atalar, A., Degertekin, F.L., and Khuri-Yakub, B.T., Appl. Phys. Lett. 72, 1397–1399 (1998).Google Scholar
4. Muralt, P., Schmitt, D., Ledermann, N., Baborowski, J., Weber, P.K., Steichen, W., Petitgrand, S., Bosseboeuf, A., Setter, N., and Gaucher, P.. Proceedings of IEEE Ultrasonic Symposium. 2001. Atlanta (USA), p. 907–911.Google Scholar
5. Dubois, M.-A. and Muralt, P., Sensors and Actuators A 77, 106–112 (1999).Google Scholar
6. Kholkin, A.L., Wüthrich, C., Taylor, D.V., and Setter, N., Rev. Sci. Instr. 67, 1935–1941 (1996).Google Scholar