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Piezoelectric and Capacitative Microactuators and Devices

Published online by Cambridge University Press:  21 February 2011

M. Sayer ,
D. Barrow ,
L. Zou ,
C.V.R. Vasant Kumar ,
R. Noteboom ,
D.A. Knapik ,
D.W. Schindel  and
D.A. Hutchins
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
D. Barrow
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
L. Zou
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
C.V.R. Vasant Kumar
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
R. Noteboom
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
D.A. Knapik
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
D.W. Schindel
Affiliation:
Department of Physics, Queen's University, Kingston, ON Canada K7L 3N6
D.A. Hutchins
Affiliation:
Department of Engineering, University of Warwick, Warwick, England
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Abstract

Ultrasonic transducers, microactuators and resonators using sol gel PZT films, polymer membranes and silicon machining techniques can take the form of cantilevers, membranes, and array sensors. Static deflections in simple electrode configurations for PZT films supported on silicon or silicon nitride membranes are of the order of 1 μm, while larger deflections can be developed under ac and resonant excitation. High frequency acoustic actuators using capacitative excitation of polymer films have been used to evaluate the performance of piezoelectric sensors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 37
Copyright
Copyright © Materials Research Society 1993

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References

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