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Physical Properties of Diamond-Like Nanocomposite Films

Published online by Cambridge University Press:  15 February 2011

B. Dorfman ,
M. Abraizov ,
B. Pypkin ,
M. Strongin ,
X.-Q. Yangn ,
D. Yan ,
Fred H. Pollak ,
J. Grow  and
R. Levy
B. Dorfman
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
M. Abraizov
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
B. Pypkin
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
M. Strongin
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
X.-Q. Yangn
Affiliation:
Physics Department, Brookhaven National Laboratory, Upton, NY 11973
D. Yan
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
Fred H. Pollak
Affiliation:
Physics Department and NY State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210
J. Grow
Affiliation:
Physics Department, New Jersey Institute of Technology, Newark, NJ 07201
R. Levy
Affiliation:
Physics Department, New Jersey Institute of Technology, Newark, NJ 07201
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Abstract

Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 351: Symposium V – Molecularly Designed Ultrafine/Nanostructured Materials , 1994 , 43
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1. Dorfman, B., Kozeikin, B.V. and Sevastyanov, V.V., Microelectronica, 11(4)(1982)349 (in Russian).Google Scholar
2. Dorfman, B., Thin Solid Films, 212(1992)267.Google Scholar
3. Dorfman, B. et al. , Thin Solid Films, 212(1992)274.Google Scholar
4. Dorfman, B., Abraizov, M., Pollak, F.H., Yan, D., Strongin, M., Yang, X.-Q. and Rong, Z.Y., to be published in Vol. 349 of the Mat. Res. Soc. Symp. Proc. (1994).Google Scholar
5. Dorfman, B., Abraizov, M., Pypkin, B., Grow, J., Levy, R., Mukhopadhyay, S. and Nourbash, S., to be published in Thin Solid Films.Google Scholar
6. Sneddon, I.E., Int. J. Eng. Sci., 3(1965)47.Google Scholar
7. Handbook of Auger Electron Spectroscopy, edited by Davis, L.E. et al. (Physical Electronics Industries, Inc., Eden Prairie, MN, 1976) p. 3.Google Scholar
8. Jiang, X., Reichelt, K. and Stritzker, B., J. Appl. Phys., 66(1989)5805 Google Scholar
9. McHargue, C.J. in Applications of Diamond Films and Related Materials, edited by Tzeng, Y., Yoshikawa, M., Murakawa, M. and Feldman, A. (Elsevier, Amsterdam, 1991) p.113.Google Scholar
10. Nir, D., Thin Solid Films, 146(1987)27.Google Scholar
11. Rubin, M., Hopper, C.B. and Cho, N-H., J. Mater. Res., 5(1990)2538.Google Scholar
12. Dorfman, B. and Abraizov, M., private communication.Google Scholar
13. Grill, A., Patel, V. and Meyerson, B., J. Mater. Res., 5(1990)2531.Google Scholar
14. Koidl, P., Wild, C., Locher, R. and Shan, R. in Diamond and Diamond-Like Films and Coatings, edited by Clausing, R. et al. (Plenum Press, New York, 1991) p. 243.Google Scholar
15. Asoka-Kumar, P., Dorfman, B. and Abraizov, M., to be presented at the 41st National Symposium of the American Vacuum Society, October, 1994, Denver, CO.Google Scholar
16. Ravi, K., Koch, C., Hu, H. and Joshi, A., J. Mater. Res., 5(1990)2356.Google Scholar
17. Mizokava, Y., Miyasato, T., Nakamara, A., Geib, K. and Wilmsen, C., J. Vac. Sci. Techol., A5(1987)2809.Google Scholar