Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-11-03T02:08:13.406Z Has data issue: false hasContentIssue false

Photopatterneable Block Co-Polymers for Laser Interference Lithography

Published online by Cambridge University Press:  11 July 2012

Taiwo R. Alabi
Affiliation:
Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405, U.S.A.
Dajun Yuan
Affiliation:
Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405, U.S.A.
Suman Das
Affiliation:
Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405, U.S.A.
Get access

Abstract

We report on the laser interference patterning of as-spun block copolymer films on silicon and silicon dioxide substrates. Our process involves the use of a pulsed laser light source of 266 nm wavelength and any type of diblock copolymer as a positive tone photoresist, resulting in the generation of sub-micron domains of different geometries and periodicity. This non-solvent based method is robust, and when combined with the inherent nano-scaled periodicity in block copolymers, can produce hierarchical patterns on substrates with potential use in the electronics and semiconductor industries.

Type
Articles
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Bieda, M., Beyer, E. and Lasagni, A. F., Journal of Engineering Materials and Technology 132 (3), 031015031016 (2010).Google Scholar
2. van Rijn, C. J. M., Journal of Microlithography, Microfabrication, and Microsystems 5 (1), 011012011016 (2006).Google Scholar
3. Moon, J. H., Ford, J. and Yang, S., Polymers for Advanced Technologies 17 (2), 8393 (2006).Google Scholar
4. Leibler, L., Macromolecules, 13 (6), 16021617(1980).Google Scholar
5. Philip, W., Hillmyer, M., Cussler, E., Macromolecules 43 (18), 77637770 (2010).Google Scholar
6. Hamley, I., Progress in Polymer Science 34 (11), 11611210 (2009)Google Scholar
7. Helfand, E., Macromolecules 8 (4), 552556 (1975).Google Scholar
8. Helfand, E. and Wasserman, Z., Macromolecules 13 (4), 994998 (1980).Google Scholar
9. Helfand, E. and Wasserman, Z. R., Macromolecules 11 (5), 960966 (1978).Google Scholar
10. Semenov, A. N., Zhurnal Eksperimentalnoi Teor. Fiz. 88 (4), 12421256 (1985).Google Scholar