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Photonic Crystal Templates Obtained by Two-Photon Laser Lithography in Photoresist SU-8

Published online by Cambridge University Press:  01 February 2011

Vygantas Mizeikis ,
Kock Khuen Seet ,
Saulius Juodkazis ,
Vygandas Jarutis  and
Hiroaki Misawa
Vygantas Mizeikis
Affiliation:
Core Research for Evolutionary Science and Technology - Japan Science and Technology Corporation, Research Institute for Electronic Science, Hokkaido University, CRIS building, N21 W10 Kita-ku Sapporo 001–0021, Japan
Kock Khuen Seet
Affiliation:
Core Research for Evolutionary Science and Technology - Japan Science and Technology Corporation, Research Institute for Electronic Science, Hokkaido University, CRIS building, N21 W10 Kita-ku Sapporo 001–0021, Japan
Saulius Juodkazis
Affiliation:
Core Research for Evolutionary Science and Technology - Japan Science and Technology Corporation, Research Institute for Electronic Science, Hokkaido University, CRIS building, N21 W10 Kita-ku Sapporo 001–0021, Japan
Vygandas Jarutis
Affiliation:
Core Research for Evolutionary Science and Technology - Japan Science and Technology Corporation, Research Institute for Electronic Science, Hokkaido University, CRIS building, N21 W10 Kita-ku Sapporo 001–0021, Japan
Hiroaki Misawa
Affiliation:
Core Research for Evolutionary Science and Technology - Japan Science and Technology Corporation, Research Institute for Electronic Science, Hokkaido University, CRIS building, N21 W10 Kita-ku Sapporo 001–0021, Japan
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Abstract

High quality templates of three-dimensional photonic crystals were fabricated in photoresist SU-8 using femtosecond laser lithography. The templates have woodpile and spiral architectures, which are widely expected to yield spectrally wide and robust photonic band gaps. Their optical characterization reveals fundamental and higher-order photonic stop-gaps in the infrared wavelength range of 2.0–8.0 μm. These templates are mechanically stable, nearly free of shrinkage-related deformations, and can be used for subsequent infiltration by optically active or high refractive index materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 850: Symposium MM – Ultrafast Lasers for Materials Science , 2004 , MM4.6
Copyright
Copyright © Materials Research Society 2005

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References

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