Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-20T00:15:21.664Z Has data issue: false hasContentIssue false
  • English
  • Français

Photochemical Dry Etching of Semiconductors and its Relationship to Semiconductor Electronic Properties

Published online by Cambridge University Press:  28 February 2011

Carol I. H. Ashby
Carol I. H. Ashby*
Affiliation:
Sandia National Laboratories, Division 1126, P. O. Box 5800, Albuquerque, NM 87185
Get access

Abstract

The general utility and selectivity of photochemical dry etching processes which require direct participation of photogenerated carriers is largely determined by the electronic properties of the semiconductor. The laser which is used to produce the carriers responsible for etching can also provide in situ measurement of some of the important electronic properties which influence the etching process.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 369
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Ashby, C. I. H., “Laser-Induced Etching”, in Physics of Thin Films, Vol.13, Francombe, M. H. and Vossen, J. L., eds., Academic Press, Orlando, Florida, 1987.Google Scholar
2. Ashby, C. I. H., Appl. Phys. Lett. 45, 892 (1984).Google Scholar
3. Ashby, C. I. H. and Biefeld, R. M., Appl. Phys. Lett. 47, 62 (1985).Google Scholar
4. Houle, F., Chem Phys. Lett. 95, 5 (1983).Google Scholar
5. Reksten, G. M., Holber, W., and Osgood, R. M. Jr., Appl. Phys. Lett. 48, 551 (1986).Google Scholar
6. Tietjen, J. J. and Amick, J. A., J. Electrochem. Soc. 113, 724 (1966).Google Scholar
7. Weakliem, H. A. and Redfield, D., J. Appl. Phys. 50, 1491 (1979).Google Scholar
8. Lum, R. M., Glass, A. M., Ostermayer, F. W. Jr., Kohl, P. A., Ballman, A. A., and Logan, R. A., J. Appl. Phys. 57, 39 (1985).Google Scholar
9. Ashby, C. I. H., Appl. Phys. Lett. 46, 752 (1985).Google Scholar
10. Seraphin, B. O., Phys. Rev. A 140, 1716 (1965).Google Scholar