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Phase Transformations in Sputtered Ni-Ti Film: Effects of Heat Treatment and Precipitates

Published online by Cambridge University Press:  26 July 2012

J. D. Busch ,
Mitchell H. Berkson  and
A. D. Johnson
J. D. Busch
Affiliation:
TiNi Alloy Company, 1144 65th Street, Unit A, Oakland CA 94608
Mitchell H. Berkson
Affiliation:
Department of Materials Science, University of California at Berkeley, CA 94720
A. D. Johnson
Affiliation:
TiNi Alloy Company, 1144 65th Street, Unit A, Oakland CA 94608
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Abstract

This research investigated the influence of heat treatment and precipitation on the phase transformation temperatures of sputter-deposited nickel-titanium films. Films 5 to 10 microns thick were subjected to isochronal and isothermal heat treatments in vacuum. Four-point resistance measutements were made and the TP, TR, Ma, and Mc temperatures identified. The correlation between transformation temperatures and the film's microstructure was studied using transmission electron microscopy. Existence of Ti2Ni and Ti11Ni14 precipitates was seen to adversely influence the phase transformation temperatures. It was concluded that precipitate-free film is preferable for mechanical actuator applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 230: Symposium R – Phase Transformation Kinetics in Thin Films , 1991 , 91
Copyright
Copyright © Materials Research Society 1992

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References

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