Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-27T02:35:46.389Z Has data issue: false hasContentIssue false

Phase Equilibria and Properties of Transparent Conductors in the Indium-Tin-Zinc Oxide System

Published online by Cambridge University Press:  10 February 2011

George B. Palmer
Affiliation:
Department of Chemistry and Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208–3113, USA, [email protected]
Kenneth R. Poeppelmeier
Affiliation:
Department of Chemistry and Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208–3113, USA, [email protected]
Doreen D. Edwards
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 North Campus Drive, Evanston, IL 60208, USA
Toshihiro Moriga
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 North Campus Drive, Evanston, IL 60208, USA
Thomas O. Mason
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 North Campus Drive, Evanston, IL 60208, USA
Jon L. Schindler
Affiliation:
Department of Electrical and Computer Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208–3118, USA
Carl R. Kannewurf
Affiliation:
Department of Electrical and Computer Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208–3118, USA
Get access

Abstract

Solid state bulk processing techniques were used to synthesize various transparent conducting oxides (TCO's) with In, Zn, and Sn cations. Optical and electronic properties of resultant phase-pure TCO's were compared to each other and to bulk samples of Sn-doped In2O3 (ITO). Reduction and heat treatment showed significant effects on optical and electronic performance, indicating optimization of processing conditions will be required for industrial applications.

Comparison of optical and electronic properties in the series of compounds: ZnkIn2O3+k, k = 3,4,5,7,11 revealed trends correlated with the materials’ internal structure. These layered compounds showed improvement of optical properties at higher Zn contents and improvement in conductivity at higher In contents. The trends suggest these materials may be useful for applications where tradeoffs between conductivity and transparency are acceptable.

Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Lyman, N. R.; Proceedings of the Symposium on Electrochromic Materials, Electrochemical Society Proceedings 1990, 90–92, 201231.Google Scholar
2 Hamberg, I.; Granqvist, C. J. Appl. Phys. 1986, 60, R123.Google Scholar
3 Wang, R.; Sleight, A.; Platzer, R.; Gardner, J. A. J. Mater. Res. 1996, 11, 1659.Google Scholar
4 Minami, T.; Kakumu, T.; Takata, S. J. Vac. Sci. Technol. A 1996, 14, 1704.Google Scholar
5 Phillips, J. M.; Cava, R. J.; Thomas, G. A.; Carter, S. A.; Kwo, J.; Siegrist, T.; Krajewski, J.; Marshall, J.; Peck, W.; Rapkine, D. Appl. Phys. Lett. 1995, 67, 2246.Google Scholar
6 Enoki, H.; Nakayama, T.; Echiyoga, J. Phys. Stat. Sol. 1992, 129, 181.Google Scholar
7 Enoki, H.; Nakayama, T.; Echiyoga, J. Phys. Stat. Sol. 1993, 137, 135.Google Scholar
8 Minami, T.; Takata, S., Sonohara, H. J. Vac. Sci. Technol. 1995, 13, 1095.Google Scholar
9 Cannard, P. J.; Tilley, R. J. D. J. Solid State Chem. 1988, 75, 418.Google Scholar
10 Moriga, T.; Edwards, D.; Mason, T.; Palmer, G.; Poeppelmeier, K.; Schindler, J.; Kannewurf, C.; Nakabayashi, I. J. Amer. Ceram. Soc. submitted.Google Scholar
11 Hecht, H. G. in Modem Aspects of Reflectance Spectroscopy; Wendlandt, W. W., Ed.; Plenum Press, New York, 1968, 122.Google Scholar
12 Burstein, E. Phys. Rev. 1954, 93, 632.Google Scholar