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PECVD Synthesis of Silicon Nanowires Assisted by Templates of Gallium Islands

Published online by Cambridge University Press:  01 February 2011

Annika Gewalt ,
Bodo Kalkofen ,
Marco Lisker  and
Edmund P. Burte
Annika Gewalt
Affiliation:
[email protected], Otto-von-Guericke University of Magdeburg, Faculty of Electrical Engineering and Information Technology, Institute of Micro and Sensor Systems, Magdeburg, Germany
Bodo Kalkofen
Affiliation:
[email protected], Otto-von-Guericke University of Magdeburg, Faculty of Electrical Engineering and Information Technology, Institute of Micro and Sensor Systems, Magdeburg, Germany
Marco Lisker
Affiliation:
[email protected], IHP GmbH, Innovations for High Performance Microelectronics, Frankfurt (Oder), Germany
Edmund P. Burte
Affiliation:
[email protected], Otto-von-Guericke University of Magdeburg, Faculty of Electrical Engineering and Information Technology, Institute of Micro and Sensor Systems, Magdeburg, Germany
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Abstract

In this study, we investigated the growth of silicon nanowires forced by small gallium droplet templates. Those gallium islands previously were deposited by a modified PECVD method. Two different delivery techniques of the trimethylgallium precursor (TMGa) were tested regarding their applicability. On the one hand standard liquid delivery was performed, on the other the precursor was transported by vapor draw out of the heated bubbler. The TMGa then was pulsed into the carrier gas flow. The effects on the deposited islands of both delivery methods were compared. As substrates <111> oriented p-doped silicon wafers were used. For the subsequent growth of the silicon wires similarly PECVD was used as growth method. Silane served as precursor. Argon and hydrogen were used as plasma enhanced gases. The effects of the Ga particles deposited by both process modes upon the generated wires were analyzed.

Keywords

plasma-enhanced CVD (PECVD) (deposition)nucleation & growthself-assembly
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1258: Symposia P/Q/R – Low-Dimensional Functional Nanostructures-Fabrication, Characterization and Applications , 2010 , 1258-Q04-04
Copyright
Copyright © Materials Research Society 2010

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