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Patterned Micro/ Nanowires by Electroplate and Lift Lithography on Reusable Ultrananocrystalline Diamond Template

Published online by Cambridge University Press:  21 February 2013

Jeffrey Machovec ,
Lori A. Lepak ,
Anirudha V. Sumant ,
Ralu Divan ,
C. Suzanne Miller ,
Daniel Rosenmann  and
Michael P. Zach
Jeffrey Machovec
Affiliation:
Chemistry Department, UW-Stevens Point, Stevens Point, WI 54481
Lori A. Lepak
Affiliation:
Chemistry Department, UW-Stevens Point, Stevens Point, WI 54481
Anirudha V. Sumant
Affiliation:
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439
Ralu Divan
Affiliation:
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439
C. Suzanne Miller
Affiliation:
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439
Daniel Rosenmann
Affiliation:
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439
Michael P. Zach*
Affiliation:
Chemistry Department, UW-Stevens Point, Stevens Point, WI 54481
*
*Email: [email protected]
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Abstract

Patterned micro-and nanowires composed of Iron Oxide (FexOy) were electrochemically deposited from an ionic liquid solution of choline chloride (ChCl) and urea, using ultrananocrystalline diamond (UNCD) ™ templates originally developed for Electroplate and Lift (E&L) Lithography. The wires were electroplated under varying rigor of anhydrous and inert atmosphere techniques, at voltages of either -2V or -5V vs. an Al/Al(III) reference electrode. The morphology of the deposited FexOy wires was studied by scanning electron microscopy (SEM), while their oxygen content was evaluated using energy dispersive spectroscopy (EDS). By using sublimed grade reagents and minimizing exposure to atmospheric water vapor and oxygen, the oxygen content of the electroplated wires decreased from 15 at% to 5 at%.

Keywords

electrodepositiondiamondFe
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1478: Symposium S – Nanostructured Carbon Materials for MEMS/NEMS and Nanoelectronics , 2012 , imrc12-1478-s7d-07
Copyright
Copyright © Materials Research Society 2013 

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