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Oxidation of Silicides - Summary

Published online by Cambridge University Press:  22 February 2011

M-A. Nicolet
M-A. Nicolet*
Affiliation:
California Institute of Technology, Pasadena, California 91125
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Extract

Silicides of transition metals are used in two distinct ways in very large scale integrated circuits: (i) in the contact pads of individual devices on a chip, and (ii) in the interconnection lines. For the latter applications, two particular properties of the silicides make them desirable: their metallic electrical conductivity, and the possibility to produce a protective coating of SiO2 under heat treatment in an oxidizing ambient. Of those two attributes, the second one is particularly attractive because it offers inherent advantages in multilevel metallization schemes. To utilize this feature of silicides successfully, an understanding of the oxidation process is mandatory.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 40: Symposium J – Electronic Packaging Materials Science I , 1984 , 317
Copyright
Copyright © Materials Research Society 1985

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References

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