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Oriented Lead Zirconate Titanate thin Films: Characterization of Film Crystallization

Published online by Cambridge University Press:  21 February 2011

James A. Voigt ,
B. A. Tuitle ,
T. J. Headley ,
M. O. Eatough ,
D. L. Lamppa  and
D. Goodnow
James A. Voigt
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185
B. A. Tuitle
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185
T. J. Headley
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185
M. O. Eatough
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185
D. L. Lamppa
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185
D. Goodnow
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185
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Abstract

Through systematic variation of film processing temperature and time, we have characterized the pyrochlore to perovskite crystallization process of solution-derived PZT 20/80 thin films. The ≈3000 Å thick films were prepared by spin deposition using <100> single crystal MgO as the film substrate. By controlled rapid thermal processing, films at different stages in the perovskite crystallization process were prepared with the tetragonal PZT 20/80 phase being <100>/<001> oriented relative to the MgO surface. An activation energy for the conversion process of 326 kJ/mole was determined by use of an Arrhenius expression using rate constants found by application of the method of Avrami. The activation energy for formation of the PZT 20/80 perovskite phase of the solution-derived films compared favorably with that calculated from data by Kwok and Desu [1] for sputter-deposited 3500 Å thick PZT 55/45 films. The similarity in activation energies indicates that the energetics of the conversion process is not strongly dependent on the method used for film deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 15
Copyright
Copyright © Materials Research Society 1993

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