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Orientation Dependence of Strontium-doped Lead Zirconate Titanate (PSZT) Thin Films on RF Magnetron Sputtering Conditions

Published online by Cambridge University Press:  01 February 2011

Sharath Sriram ,
Madhu Bhaskaran ,
Anthony Stephen Holland  and
Geoffrey K Reeves
Sharath Sriram
Affiliation:
[email protected], RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia, +61390012346
Madhu Bhaskaran
Affiliation:
[email protected], RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia
Anthony Stephen Holland
Affiliation:
[email protected], RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia
Geoffrey K Reeves
Affiliation:
[email protected], RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia
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Abstract

Studies on strontium-doped lead zirconate titanate (PSZT) have been reported for its high piezoelectric and ferroelectric properties. For PSZT to exhibit pronounced piezoelectric behaviour it must have a crystalline grain structure (perovskite orientation). This paper is a study of the deposition of PSZT thin films by RF magnetron sputtering and the effect of cooling rate, after deposition at temperatures between 500 °C and 700 °C. X-Ray Diffraction (XRD) results are used to show how a cooling rate of 5 °C/min increases the degree of perovskite orientation in sputtered films, when compared to a cooling rate of 15 °C/min. The absence of significant shifts in the positions of diffraction peak patterns in XRD results are used to demonstrate low stress in the deposited films. Atomic Force Microscope (AFM) imaging is used to show the crystalline nature of the PSZT thin films.

Keywords

piezoelectricsputteringx-ray diffraction (XRD)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 928: Symposium GG – Current and Future Trends of Functional Oxide Films , 2006 , 0928-GG14-11
Copyright
Copyright © Materials Research Society 2006

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