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Ordered Arrays of Colloidal Gold Nanoparticles Fabricated by Focused Ion Beam Techniques

Published online by Cambridge University Press:  26 February 2011

Todd Simpson  and
Ian V Mitchell
Todd Simpson
Affiliation:
[email protected], University of Western Ontario, Physics & Astronomy, 1151 Richmond St, London, N6A2H3, Canada, 519 661 2111 x86977, 519 662 2033
Ian V Mitchell
Affiliation:
[email protected], University of Western Ontario, Physics & Astronomy, 1151 Richmond St, London, N6A3K7, Canada
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Abstract

Through-holes of diameter 35nm and larger were milled in 100nm thick silicon nitride windows by focused ion beam milling. The holes were sized to optimize capture of gold nanoparticles from a liquid suspension. The colloidal suspensions of gold particles were deposited onto the membrane and drawn through the holes by capillary forces. Efficient, single particle filling is demonstrated for both 100nm and 250nm diameter particles indicating that once a hole is filled, flow can be effectively blocked. We show that lithographically defined arrays of colloidal gold can be achieved with >98% filling.

Keywords

lithography (removal)ion-beam processingcolloid
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 983: Symposium LL – Focused Ion Beams for Analysis and Processing , 2006 , 0983-LL01-05
Copyright
Copyright © Materials Research Society 2007

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References

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