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The Optical Properties of Channel Waveguides in Batio3 Thin Films

Published online by Cambridge University Press:  10 February 2011

B. A. Block ,
B. W. Wessels ,
D. M. Gill ,
C. W. Conrad  and
S. T. Ho
B. A. Block
Affiliation:
Northwestern University, Department of Materials Science and Engineering and the Materials Research Center, Evanston, IL 60208
B. W. Wessels
Affiliation:
Northwestern University, Department of Materials Science and Engineering and the Materials Research Center, Evanston, IL 60208
D. M. Gill
Affiliation:
Northwestern University, Department of Electrical Engineering and Computer Science and the Materials Research Center, Evanston, IL 60208
C. W. Conrad
Affiliation:
Northwestern University, Department of Electrical Engineering and Computer Science and the Materials Research Center, Evanston, IL 60208
S. T. Ho
Affiliation:
Northwestern University, Department of Materials Science and Engineering and the Materials Research Center, Evanston, IL 60208
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Abstract

BaTiO3 epitaxial films have been prepared on (001) MgO substrates by metalorganic chemical vapor deposition. The as‐deposited 0.2 μm thick films had a surface roughness of 12 nm. Channel waveguides were fabricated from the films and the optical throughput measured. To differentiate the surface scattering loss from the internal scattering loss, waveguides were also prepared with a surface planarization step to reduce the surface roughness to 2.5 nm. The waveguide loss was greatly reduced for the planarized waveguides. The results indicate that surface and side wall roughness accounted for the majority of the waveguide loss. Grain boundary grooving lead to surface roughness and routes to overcome this problem are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 446: Amorphous and Crystalline Insulating Thin Films–1996 , 1996 , 349
Copyright
Copyright © Materials Research Society 1997

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References

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