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Optical Properties of Aluminium and Nitrogen in Compensated 4H-SiC Epitaxial Layers

Published online by Cambridge University Press:  21 March 2011

Mikael Syväjärvi ,
Rositza Yakimova ,
Anelia Kakanakova-Georgieva ,
Anne Henry ,
Erik Janzén  and
Margareta K. Linnarsson
Mikael Syväjärvi
Affiliation:
Linköping University, Dept of Physics and Measurement Technology, SE-581 83 Linköping, SWEDEN
Rositza Yakimova
Affiliation:
Linköping University, Dept of Physics and Measurement Technology, SE-581 83 Linköping, SWEDEN
Anelia Kakanakova-Georgieva
Affiliation:
Linköping University, Dept of Physics and Measurement Technology, SE-581 83 Linköping, SWEDEN
Anne Henry
Affiliation:
Linköping University, Dept of Physics and Measurement Technology, SE-581 83 Linköping, SWEDEN
Erik Janzén
Affiliation:
Linköping University, Dept of Physics and Measurement Technology, SE-581 83 Linköping, SWEDEN
Margareta K. Linnarsson
Affiliation:
Royal Institute of Technology, Dept of Solid State Electronics, SE-164 40 Kista, SWEDEN
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Abstract

Compensating impurities affect the device performance but still the fundamental knowledge of this effect in SiC is poor. We demonstrate that the optical properties are affected by compensation effects between the nitrogen donor and aluminium acceptor in 4HSiC epilayers. As demonstrated using low-temperature photoluminescence measurements, the interaction occurs between the impurity bound excitons caused by changes in the aluminium concentration while the nitrogen concentration is constant. The variation is observed over two orders of magnitude in the aluminium concentration. The interplay is also observed in cathodoluminescence measurements between the band edge luminescence and nitrogen-aluminium donor-acceptor pair emission. These observations may be possible to utilize for a non-destructive characterization of compensated epilayers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 640: Symposium H – Silicon Carbide-Materials, Processing, and Devices , 2000 , H7.10
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

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