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Optical Diagnostics for a High.Power, RF-Inductively Coupled Plasma

Published online by Cambridge University Press:  22 February 2011

N. S. Nogar ,
G. L. Keaton ,
J. E. Anderson  and
M. Trkula
N. S. Nogar
Affiliation:
Chemical and Laser Sciences Division, MS G738
G. L. Keaton
Affiliation:
Chemical and Laser Sciences Division, MS G738
J. E. Anderson
Affiliation:
Chemical and Laser Sciences Division, MS G738
M. Trkula
Affiliation:
Materials Science and Technology Division, MS G770 Los Alamos National Laboratory, Los Alamos, New Mexico, 87545
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Abstract

Emission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design 1 inductively coupled plasma. This plasma is used for a variety of syntheses 2,3 including SiC, TiC, BN, AlN and diamond. Temporallyand spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 117: Symposium C – Process Diagnostics: Materials, Combustion, Fusion , 1988 , 125
Copyright
Copyright © Materials Research Society 1988

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References

1. Hull, D., U.S. Patent 4 431 901 (February 14, 1984).CrossRefGoogle Scholar
2. Vogt, G. J., Phillips, D. S. and Taylor, T. N., Adv. in Ceramics 21, 203 (1987).Google Scholar
3. Vogt, G. J., Vigil, R. S., Newkirk, L. R. and Trkula, M. in Proceedings o the SeYvfe nth International Symposium on Plasma Chemistry, Eindhoven (1985), 668–673.Google Scholar
4. Flamm, D. L., Gilliland, E. R. and Baddour, R.F., Ind. Eng. Chem. Fundam. 12, 276 (1973).CrossRefGoogle Scholar
5. Milles, J. W. and Hieftje, G. M., Spectrochimica. Acta. 39B, 859 (1984).CrossRefGoogle Scholar