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One Step Preparation of Y-Ba-Cu-O Superconducting Films by the RF Thermal Plasma CVD

Published online by Cambridge University Press:  21 February 2011

H. Zhu ,
Y.C. Lau  and
E. Pfender
H. Zhu
Affiliation:
Center for Plasma-Aided Manufacturing, Mechanical Engineering Department, University of Minnesota, Minneapolis, MN 55455
Y.C. Lau
Affiliation:
Center for Plasma-Aided Manufacturing, Mechanical Engineering Department, University of Minnesota, Minneapolis, MN 55455
E. Pfender
Affiliation:
Center for Plasma-Aided Manufacturing, Mechanical Engineering Department, University of Minnesota, Minneapolis, MN 55455
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Abstract

Y-Ba-Cu-O superconducting films were prepared on polycrystalline CaO stabilized ZrO2 substrates using RF thermal plasma chemical vapor deposition. The important feature of this work is that superconducting films can be deposited at a high rate of ˜0.1 μm/min in the as-deposited state without post-oxidation. Mixed aqueous nitrate solutions of yttrium, barium and copper were used. The liquid precursors were atomized by an ultrasonic nebulizer and introduced into the RF thermal plasma using oxygen as a carrier gas. Different substrate temperatures of 450 °C, 500 °C and 600 °C were used during deposition. The substrate temperatures were controlled by varying the feed rate of cooling gas to the substrate holder. X-ray diffraction, SEM and transition temperature measurements were used to characterize the as-deposited films. The X-ray diffraction patterns show that the as-deposited films were preferentially oriented with the c-axis perpendicular to the plane of the films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 190: Symposium M – Plasma Processing and Synthesis of Materials III , 1990 , 113
Copyright
Copyright © Materials Research Society 1991

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References

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