Hostname: page-component-cd9895bd7-gvvz8 Total loading time: 0 Render date: 2024-12-27T02:25:14.675Z Has data issue: false hasContentIssue false

On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” Concept

Published online by Cambridge University Press:  10 February 2011

J. Meier
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
P. Torres
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
R. Platz
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
S. Dubail
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
U. Kroll
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
J. A. Anna Selvan
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
N. Pellaton Vaucher
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
Ch. Hof
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
D. Fischer
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
H. Keppner
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
A. Shah
Affiliation:
Institut de Microtechnique, A.-L. Breguet 2, Université de Neuchâtel, CH-2000 Neuchâtel, Switzerland
K. -D. Ufert
Affiliation:
Siemens Solar, Frankfurter Ring, D-8000 Müinchen, Germany
P. Giannoulès
Affiliation:
SAES Getters GmbH, D-50937 Köln 41, Germany
J Koehler
Affiliation:
University of Konstanz, D-78434 Konstanz, Germany
Get access

Abstract

Recently the authors have demonstrated that compensated or “midgap” intrinsic hydrogenated microcrystalline silicon (μc-Si:H), as deposited by the Very High Frequency Glow Discharge (VHF-GD) technique, can be used as active layer in p-i-n solar cells. Compared to amorphous silicon (a-Si:H), μc-Si:H was found to have a significantly lower energy bandgap of around 1 eV. The combination of both materials (two absorbers with different gap energies) leads to a “real” tandem cell structure, which was called the “micromorph” cell. Micromorph cells can make better use of the sun's spectrum in contrast to conventional double-stacked a-Si:H / a-Si:H tandems.

The present study will show that the compensation technique (involving boron “microdoping”) used sofar for obtaining midgap μc-Si:H can be replaced by the application of a gas purifier. The use of this gas purifier has a beneficial influence on the transport properties of undoped intrinsic μc-Si:H. By this procedure, increased cell efficiencies in both, single microcrystalline silicon p-i-n as well as micromorph cells could be obtained. In the first case 7.7 % stable, and in the second case 13.1% initial efficiency could be achieved under AM1.5 conditions. Preliminary light-soaking experiments performed on the tandem cells indicate that microcrystalline silicon could contribute to an enhancement of the stable efficiency performance. Micromorph cell manufacturing is fully compatible to a-Si:H technology; however, its deposition rate is still too low. With further increase of the rate, a similar cost reduction potential like in a-Si:H technology can be extrapolated.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Curtins, H., Wyrsch, N., Shah, A., Electron. Lett. 23, (1987), p. 228.Google Scholar
[2] Flückiger, R., Meier, J., Keppner, H., Götz, M., Shah, A., Proc. 23rd IEEE PVSC (1993), p. 839.Google Scholar
[3] Keppner, H., Kroll, U., Meier, J., Shah, A., Solid State Phenomena 44–46, (1995), pp. 97126.Google Scholar
[4] Finger, F., Hapke, P., Luysberg, M., Carius, R., Wagner, H., Appl. Phys. Lett. 65, (1994), p. 2588.Google Scholar
[5] Flückiger, R., Meier, J., Crovini, G., Demichelis, F., Giorgis, F., Pirri, C. F., Tresso, E., Pohl, J., Rigato, V., Zandolin, S., Caccavale, F., Mat. Res. Soc. Symp. Proc. 358, (1995), p. 751.Google Scholar
[6] Grebner, S., Wang, F., and Schwarz, R., Mat. Res. Soc. Symp. Proc. 283, (1992), p.513.Google Scholar
[7] Wang, F., Liu, H.N., He, Y.L., Schweiger, A., Schwarz, R., J. Non-Cryst. Solids 137&138, (1991), p. 511.Google Scholar
[8] Willeke, G., thesis (1983), Univ. of Dundee.Google Scholar
[9] C. Wang, G. Lucowsky, 21th IEEE (1990), p. 1614; and Williams, M.J., Wang, C., Lucovsky, G., J. Non-Cryst. Solids 137&138, (1991), p. 737.Google Scholar
[10] Torres, P., Keppner, H., Flückiger, R., Meier, J., Shah, A., Kiess, H., Proc. 12th EC PVSEC (1994), p. 705.Google Scholar
[11] Keppner, H., Torres, P., Flückiger, R., Meier, J., Shah, A., Fortmann, C., Fath, P., Willeke, G., Happle, K., Kiess, H., Solar Energy Materials and Solar Cells 34, (1994), p. 201.Google Scholar
[12] Flüickiger, R., Meier, J., Goetz, M., Shah, A., J. Appl. Phys. 77, (1995), p. 712.Google Scholar
[13] Meier, J., Flückiger, R., Keppner, H., Shah, A., Appl. Phys. Lett. 65, (1994), p. 860.Google Scholar
[14] Meier, J., Dubail, S., Flückiger, R., Fischer, D., Keppner, H., Shah, A., Proc. 1st WCPEC (1994), p. 409.Google Scholar
[15] Meier, J., Flückiger, R., Keppner, H., Götz, M., Shah, A., Proc. 12th EC PVSEC (1994), p. 1237.Google Scholar
[16] Meier, J., Dubail, S., Selvan, J.A. Anna, Vaucher, N. Pellaton, Platz, R., Hof, C., Flückiger, R., Kroll, U., Wyrsch, N., Torres, P., Keppner, H., Shah, A., Ufert, K.D., Proc. 13th Europ. PVSEC, (Nice 1995), p. 1445.Google Scholar
[17] Beck, N., Meier, J., Fric, J., Remes, Z., Poruba, A., Flückiger, R., Pohl, J., Shah, A., Vanecek, M., 16th ICAS (Kobe 1995), to be published in J. Non-Cryst. Solids.Google Scholar
[18] Green, M.A., Keevers, M. J., Progress in Photovoltaics: Research and Applications 3, (1995), p. 189.Google Scholar
[19] Flückiger, R., Meier, J., Shah, A., Catana, A., Brunel, M., Nguyen, H.V., Collins, R.W., Carius, R., Mat. Res. Soc. Symp. Proc. 336, (1994), p. 511.Google Scholar
[20] Kroll, U., Meier, J., Keppner, H., Shah, A., Littlewood, S.D., Kelly, I.E., Giannoulès, P., J. Vac. Sci. Technol. A 13, (1995), p. 2742.Google Scholar
[21] Kroll, U., Meier, J., Keppner, H., Shah, A., Littlewood, S.D., Kelly, I.E., Giannoulès, P., Mat. Res. Soc. Symp. Proc. 377, (1995), p. 39.Google Scholar
[22] Selvan, J.A. Anna, Keppner, H., Götz, M., Shah, A., this conference.Google Scholar
[23] van den Berg, P., Calwer, H., Marklsdorfer, P., Meckes, R., Schulze, F. W., Ufert, K.-D., Vogt, H., Solar Energy Materials and Solar Cells 31, (1993), p. 253.Google Scholar
[24] Platz, R., Fischer, D., Hof, C., Dubail, S., Kroll, U., Meier, J., Shah, A., this conference.Google Scholar
[25] Fischer, D., Shah, A., Appl. Phys. Lett. 65, (1994), p. 986.Google Scholar
[26] Torres, P. et al., to be submitted to Appl. Phys. Lett..Google Scholar
[27] Brodsky, M.H., Cardona, M., Cuomo, J.J., Phys. Rev. B 16, (1977), p. 3556.Google Scholar
[28] Lucovsky, G., Nemanich, R.J., Knights, J.C., Phys. Rev. B 19, (1979), p. 2064.Google Scholar
[29] Wagner, H., Beyer, W., Solid State Commun. 48, (1983), p. 587.Google Scholar
[30] Chabal, Y.J., Chaban, E.E., Christman, S.B., J. Electron Spectr. and Rel. Phenom. 29, (1983), p. 35.Google Scholar
[31] Chabal, Y.J., Phys. Rev. Lett. 50, (1983), p. 1850.Google Scholar
[32] Satoh, T., Hiraki, A., Jpn. J. Appl. Phys. 24, (1985), p. L491.Google Scholar
[33] Kroll, U., Meier, J., Shah, A., Mikhailov, S., Weber, J., submitted to J. Appl. Phys..Google Scholar
[34] Finger, F., Prasad, K., Dubail, S., Shah, A., Tang, X.-M., Weber, J., Beyer, W., Mat. Res. Soc. Symp. Proc. 219, (1991), p. 383.Google Scholar
[35] Wyrsch, N., Goerlitzer, M., Beck, N., Meier, J., Shah, A., this conference.Google Scholar
[36] Baba, T., Matsuyama, T., Tsuge, S., Wakisaka, K., Tsuda, S., Proc. 13th Europ. PVSEC, (Nice 1995), p. 1708.Google Scholar
[37] Yang, J., Xu, X., Guha, S., Mat. Res. Soc. Symp. Proc. 336, (1994), p. 687.Google Scholar