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On the Evolution of Surface Morphology of Polysilicon Mems Structures During Fatigue

Published online by Cambridge University Press:  17 March 2011

S. M. Allameh ,
B. Gally ,
S. Brown  and
W.O. Soboyejo
S. M. Allameh
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, 1 Olden Street, Princeton, NJ 08544
B. Gally
Affiliation:
Exponent Failure Analysis and Associates, 21 Strathmore Road, Natick, MA 01760
S. Brown
Affiliation:
Exponent Failure Analysis and Associates, 21 Strathmore Road, Natick, MA 01760
W.O. Soboyejo
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, 1 Olden Street, Princeton, NJ 08544
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Abstract

This paper presents the results of an atomic force microscopy (AFM) study of the evolution of surface topology in notched polysilicon MEMS structures deformed under cyclic loading at room temperature. The in-situ and ex-situ AFM studies reveal changes in surface topology after cyclic actuation at a relative humidity of ∼70%. These lead ultimately to large wavelength modulations close to the bottom of the notch, in the areas where the tensile stresses are maximum. This is in contrast with the wavelength of the surface modulations away from the notch, which remain relatively unchanged. The results are discussed in terms of possible chemical/surface processes that can occur in the presence of water vapor.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE2.3
Copyright
Copyright © Materials Research Society 2001

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References

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