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Offset Printing of Liquid Microstructures for High Resolution Lithography

Published online by Cambridge University Press:  10 February 2011

Scott M. Miller
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
Anton A. Darhuber
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
Sandra M. Troian
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
Sigurd Wagner
Affiliation:
Dept. of Electrical Engineering, Princeton University, Princeton, N.J. 08544
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Abstract

We have investigated the direct printing of polymer solutions from a chemically patterned stamp onto a hydrophilic target substrate as a new high-throughput alternative to optical lithography. The patterns on the stamp, which are typically in the micron size range, define regions of alternating wettability. They are produced by patterning a hydrophobic self-assembled monolayer previously deposited onto a hydrophilic surface, typically a glass slide or silicon wafer with a natural oxide coating. Polar liquids or aqueous polymeric solutions are then deposited only onto the hydrophilic surface patterns by dip-coating the stamp in a liquid reservoir. The deposited film thickness depends critically on the speed of withdrawal and the feature size and shape. For vertically oriented hydrophilic stripes dipped in a reservoir containing a polar liquid, we have developed a theoretical model whose prediction for the maximum deposited film thickness agrees exceptionally well with experimental measurements. After deposition, the wetted stamp is pressed against a target substrate by means of a motion controlled press. In this way we have so far printed 5µm wide polyethylene oxide lines onto a silicon wafer.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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References

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