Hostname: page-component-cd9895bd7-gvvz8 Total loading time: 0 Render date: 2024-12-27T01:52:01.411Z Has data issue: false hasContentIssue false
  • English
  • Français

Novel Synthesis of Metal Nanowhiskers: High-Temperature Glancing Angle Deposition

Published online by Cambridge University Press:  01 February 2011

Motofumi Suzuki ,
Kenji Hamachi ,
Koji Nagai ,
Ryo Kita ,
Kaoru Nakajima  and
Kenji Kimura
Motofumi Suzuki
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoto, 606-8501, Japan, +81-75-753-5196, +81-75-753-5196
Kenji Hamachi
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Koji Nagai
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Ryo Kita
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Kaoru Nakajima
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Kenji Kimura
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Get access

Abstract

We demonstrate high temperature glancing deposition (HT-GLAD) of metals on the heated substrate. It has been found that Al, Ag, Au, Fe nano-whiskers grow on the substrate of Si, SiO2, and glass substrates. The robustness in the selection of materials suggests that the HT-GLAD is a universal method to grow nano-whiskers of various metals. We also demonstrate the selective growth of the nano-whiskers on the substrate with micro-trench patterns. The metal nano-whiskers are useful for the nano electromechanical devices and vacuum microelectronics.

Keywords

nanostructurephysical vapor deposition (PVD)crystal growth
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1058: Symposium JJ – Nanowires–Novel Assembly Concepts and Device Integration , 2007 , 1058-JJ03-09
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Suzuki, M., Nagai, K., Kinoshita, S., Nakajima, K., Kimura, K., Okano, T. and Sasakawa, K., Appl. Phys. Lett. 89, 133103 (2006).Google Scholar
2. Suzuki, M., Nagai, K., Kinoshita, S., Nakajima, K., Kimura, K., Okano, T. and Sasakawa, K., J. Vac. Sci. Technol. A 25, 1098 (2007).Google Scholar
3. Melmed, A. J. and Gomer, R., J. Chem. Phys. 34, 1802 (1961).Google Scholar
4. Sethna, J. P., Science 318, 207 (2007).Google Scholar
5. Csikor, F. F., Motz, C., Weygand, D., Zaiser, M. and Zapperi, S., Science 318, 251 (2007).Google Scholar