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Novel Synthesis of Metal Nanowhiskers: High-Temperature Glancing Angle Deposition

Published online by Cambridge University Press:  01 February 2011

Motofumi Suzuki ,
Kenji Hamachi ,
Koji Nagai ,
Ryo Kita ,
Kaoru Nakajima  and
Kenji Kimura
Motofumi Suzuki
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoto, 606-8501, Japan, +81-75-753-5196, +81-75-753-5196
Kenji Hamachi
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Koji Nagai
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Ryo Kita
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Kaoru Nakajima
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
Kenji Kimura
Affiliation:
[email protected], Kyoto University, Department of Micro Engineering, Yoshida, Sakyo, Kyoyo, 606-8501, Japan
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Abstract

We demonstrate high temperature glancing deposition (HT-GLAD) of metals on the heated substrate. It has been found that Al, Ag, Au, Fe nano-whiskers grow on the substrate of Si, SiO2, and glass substrates. The robustness in the selection of materials suggests that the HT-GLAD is a universal method to grow nano-whiskers of various metals. We also demonstrate the selective growth of the nano-whiskers on the substrate with micro-trench patterns. The metal nano-whiskers are useful for the nano electromechanical devices and vacuum microelectronics.

Keywords

nanostructurephysical vapor deposition (PVD)crystal growth
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1058: Symposium JJ – Nanowires–Novel Assembly Concepts and Device Integration , 2007 , 1058-JJ03-09
Copyright
Copyright © Materials Research Society 2008

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References

REFERENCES

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