Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-25T15:18:25.872Z Has data issue: false hasContentIssue false
  • English
  • Français

A Novel Method to Measure Poisson's Ratio of Thin Films

Published online by Cambridge University Press:  10 February 2011

V. Ziebart ,
O. Paul ,
U. Münch  and
H. Baltes
V. Ziebart
Affiliation:
Physical Electronics Laboratory, HPT H6, ETH Zurich, CH-8093 Zurich, Switzerland
O. Paul
Affiliation:
Physical Electronics Laboratory, HPT H6, ETH Zurich, CH-8093 Zurich, Switzerland
U. Münch
Affiliation:
Physical Electronics Laboratory, HPT H6, ETH Zurich, CH-8093 Zurich, Switzerland
H. Baltes
Affiliation:
Physical Electronics Laboratory, HPT H6, ETH Zurich, CH-8093 Zurich, Switzerland
Get access

Abstract

We report a novel method to measure Poisson's ratio v of compressively prestressed thin films. The method exploits a v-dependent mechanical instability transition of buckled long rectangular membranes under differential pressure. This allows to determine v with high accuracy, using a physical model of the plate instability. The method was used to extract v = 0.253±0.017 from 0.704±0.003 μim thick PECVD silicon nitride films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 27
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Vlassak, J. J. and Nix, W. D., J. Mater. Res., Vol.7(12), (1992) pp. 3242–3249.Google Scholar
2.Tabata, O., Tsuchiya, T., and Fujitsuka, N., Technical Digest of the 12th Sensor Symposium, (1994) pp. 19–22.Google Scholar
3.Baltes, H., Korvink, J. G. and Paul, O. in Simulation of Semiconductor Devices and Processes, Vol.6, eds. H., Ryssel and P., Pichler, (Springer, 1995), pp. 1–9.Google Scholar
4.Sharpe, W. N. Jr., Yuan, B., and Vaidyanathan, R., and Edwards, R. L., Proceedings of the Tenth Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, (1997) pp. 424–429.Google Scholar
5.Ziebart, V., Paul, O., Münch, U., Schwizer, J., and Baltes, H., “Mechanical Properties of Thin Films from the Load-Deflection of Long Clamped Pla”, J. Microelectromech. Systems, (1997) submitted.Google Scholar
6.Timoshenko, S. and Woinowsky-Krieger, S., Theory of Plates and Shells, (McGraw-Hill, 1959) pp. 4–19.Google Scholar
7.Landau, L. D. and Lifshitz, E. M., Theory of Elasticity, (Pergamon Press, 1986) §§ 11–14.Google Scholar
8.Landau, L. D. and Lifshitz, E. M., Theory of Elasticity (Pergamon Press, 1986) §§ 1, 2, 13, 14.Google Scholar
9.Timoshenko, S. P. and Gere, J. M., Theory of Elastic Stability (McGraw-Hill, 1963) chap. 9.Google Scholar